Quasi Monolithic Silicon Load Cell for Loads up to 1000 Insensitivity to Non-homogeneous Load Distributions
نویسندگان
چکیده
In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 1000 kg. The sensitive surface of 1 cm2 contains an array of sensing elements to make the load cell insensitive to non-homogeneous load distributions resulting in higher accuracy. The load cell has been realized and tested. Measurement results show an accuracy of 0.2 % of full scale limited by the measurement electronics. An accuracy of 0.03 % or better is expected to be feasible.
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